AT405947T
A method of fabrication of a substrate for an epitaxial growth
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority and filed
- Granted
- Today
11 members in 5 offices
Members11
| Document | Office | Kind | |
|---|---|---|---|
| EP1519409A1 | European Patent Office (EPO) | A1 | |
| US2005066886A1 | United States of America | A1 | |
| JP2005109478A | Japan | A | |
| US7232488B2 | United States of America | B2 | |
| EP1519409B1 | European Patent Office (EPO) | B1 | |
| AT405947TThis record | Austria | T | |
| ATE405947T1 | Austria | T1 | |
| DE60323098D1 | Germany | D1 | |
| JP2009290228A | Japan | A | |
| JP4414312B2 | Japan | B2 | |
| JP4733201B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 3292377
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG VONN SUBSTRATEN FÜR EPITAKITISCHES WACHSTUM
- English
- PROCESS FOR PRODUCING SUBSTRATES FOR EPITACITIC GROWTH
Classification
- CPC, 4
- H01L21/76254
- C30B25/02
- C30B29/52
- Y10S117/915
- IPC, 5
- C30B25 02
- C30B25 18
- C30B29 52
- H01L21 20
- H01L21 762