AT403937T
Multi-height finfets
Abstract
The invention claims a FinFET device, wherein of the first fin sheet and second fin. Each fin with channel region and a source and drain electrode area of the channel area extends. The fin with different same. The invention arranged between the fin the gate conductor. The gate conductor is vertical to the fin extend and close crossed the first fin sheet and second fin sheet and area. The fins are parallel. First fin sheet and second fins are ratio a ratio 1: two - thirds. The ratio is used to adjust the opening groove width of property and an transistor with transistor.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
15 members in 8 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 24973803 | United States of America | A |
Members15
| Document | Office | Kind | |
|---|---|---|---|
| US2004222477A1 | United States of America | A1 | |
| WO2004100290A2 | World Intellectual Property Organization (WIPO) | A2 | |
| TW200507265A | Taiwan Province of China | A | |
| WO2004100290A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US6909147B2 | United States of America | B2 | |
| KR20060004659A | Republic of Korea | A | |
| EP1620891A2 | European Patent Office (EPO) | A2 | |
| CN1784782A | China | A | |
| KR100690559B1 | Republic of Korea | B1 | |
| EP1620891A4 | European Patent Office (EPO) | A4 | |
| TWI289354B | Taiwan Province of China | B | |
| EP1620891B1 | European Patent Office (EPO) | B1 | |
| AT403937TThis record | Austria | T | |
| DE602004015592D1 | Germany | D1 | |
| CN100466229C | China | C |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 4707026
Titles2
- German
- METHODE ZUR HERSTELLUNG VON FINFETS MIT MEHREREN HÖHEN
- English
- METHOD FOR THE PRODUCTION OF FINFETS OF MULTIPLE HEIGHTS
Classification
- CPC, 5
- H01L29/785
- H01L21/84
- H01L27/1203
- H01L29/045
- H01L29/66795
- IPC, 6
- H01L21 336
- H01L21 8238
- H01L21 84
- H01L27 12
- H01L29 04
- H01L29 786