Specimen holding robotic arm end effector

The manipulator (16) end-effector (10,110,210) competent network profit rope of this invention (12) (14) and processing) and between the crystal film magazine the semiconductor wafer. The end-effector comprising a near-end and far-end support block (24,26,124,126), methods cushions and depths of the component (32,34,132,134) or close to the wafer is contact or the external board and clamping board is the annular forbidden area (30) request. The drive contact head (50,150,220) and a vacuum driving board (52,152) between the contraction board loading position and side to the wafer the far-end support block the stretching positions the movement, in wafer edge or wherein forbidden area. End-effector - comprising an optical fibre transmission sensor (90,102,202,214), for determining the wafer surface, ribs and gradient, and thickness parameter. The sensor providing manipulator of and elevate two locating data the safeguard mechanism; and loop and load from multiple gaps very small processed on the crystal film magazine deposited rapidly accurately; and method for effectively end-effector and board with accident contact and ensure the clamping board cleanly reliably the edge or wherein forbidden area.