AT384940T

Method and apparatus for transmission measurement of the geometric structure of an optical component

Abstract

Measurement procedure by transmitting the geometrical structure of an optical component (2), comprising the steps: - of illuminating the optical component with a first incident light (8, 10), whose wavefront is known, - of measuring ( 16, 18) the wavefront of said first light after transmission by said optical component, - of illuminating the optical component by a second incident light (12, 14), whose wavefront is known, - of measuring (16, 18) the wavefront of said second light after transmission by said optical component, - of calculating the geometrical structure of said optical component from the wavefronts measured in said measurement steps.

Term

No projected expiry on record.

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0010794FranceA

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WO0216902A1World Intellectual Property Organization (WIPO)A1
FR2813391A1FranceA1
EP1224448A1European Patent Office (EPO)A1
FR2813391B1FranceB1
US2003112426A1United States of AmericaA1
JP2004507730AJapanA
US6909498B2United States of AmericaB2
EP1224448B1European Patent Office (EPO)B1
AT384940TThis recordAustriaT
DE60132551D1GermanyD1
ES2300355T3SpainT3
DE60132551T2GermanyT2
JP5173106B2JapanB2