Optical position measuring device
Abstract
An optical position-measuring device is specified which consists of an incremental measuring graduation and a scanning unit movable relative thereto in at least one measuring direction. By means of the scanning unit, position-dependent incremental signals can be generated from the scanning of the measuring graduation. The scanning unit comprises a transparent carrier substrate, on which at least two incremental signal scanning arrangements arranged in the measuring direction are arranged. These each have a light source and a plurality of incremental signal detector elements distributed around the light source, via which partial incremental signals can be generated from the scanning of the measuring graduation. The at least two incremental signal scanning arrangements are arranged on the side of the carrier substrate which is remote from the measuring graduation. Furthermore, a plurality of fields are provided with scanning gratings, which are each spatially assigned to the incremental signal detector elements and arranged between the incremental signal scanning arrangements and the carrier substrate. The various scanning gratings are arranged such that partial incremental signals having predetermined phase relationships can be generated from the various incremental signal detector elements (FIG. 3).
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
8 members in 5 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 10116599 | Germany | A |
Members8
| Document | Office | Kind | |
|---|---|---|---|
| WO02082021A1 | World Intellectual Property Organization (WIPO) | A1 | |
| DE10116599A1 | Germany | A1 | |
| EP1377799A1 | European Patent Office (EPO) | A1 | |
| US2004189984A1 | United States of America | A1 | |
| US7123354B2 | United States of America | B2 | |
| EP1377799B1 | European Patent Office (EPO) | B1 | |
| AT382849TThis record | Austria | T | |
| DE50211460D1 | Germany | D1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN |
Numbers
- Application
- 2735189
Titles2
- German
- OPTISCHE POSITIONSMESSEINRICHTUNG
- English
- OPTICAL POSITION MEASURING DEVICE
Classification
- CPC, 2
- G01D5/36
- G01D5/34715
- IPC, 4
- G01D5 245
- G01D5 347
- G01D5 36
- G01D5 38