Nova Patents
AT373314T

Plasma surface treatment method and device for carrying out said method

Abstract

The invention relates to a surface plasma processing method, image for processing the object or the particles surface, comprising a plasma manufacturing, applied to the used for plasma processing surface; the invention realizing the waits for processing surface of plate or the plasma by an audio frequency vibration, so to treat between the processing surface and plasma with a clamp.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

32 members in 12 offices

This recordMember, by publication datePriority claim2 more offices are in the list below

Priority claims3

Priority claims
DocumentOfficeKindDate
01810318European Patent Office (EPO)A
01120974European Patent Office (EPO)A
01810915European Patent Office (EPO)A

Members32

Family members, oldest first
DocumentOfficeKind
WO02076511A2World Intellectual Property Organization (WIPO)A2
AU2002242923A1AustraliaA1
US2002182101A1United States of AmericaA1
WO03018185A2World Intellectual Property Organization (WIPO)A2
WO02076511A3World Intellectual Property Organization (WIPO)A3
US2003165636A1United States of AmericaA1
WO03018185A3World Intellectual Property Organization (WIPO)A3
EP1374276A2European Patent Office (EPO)A2
BR0208242ABrazilA
EP1420876A2European Patent Office (EPO)A2
CN1511333AChinaA
JP2004527077AJapanA
US2004238345A1United States of AmericaA1
JP2005503250AJapanA
RU2003131340ARussian FederationA
MXPA03008615AMexicoA
EP1420876B1European Patent Office (EPO)B1
AT301496TAustriaT
ATE301496T1AustriaT1
DE60205493D1GermanyD1
ES2247370T3SpainT3
DE60205493T2GermanyT2
RU2283667C2Russian FederationC2
US7172790B2United States of AmericaB2
EP1374276B1European Patent Office (EPO)B1
AT373314TThis recordAustriaT
ATE373314T1AustriaT1
DE60222391D1GermanyD1
US7288293B2United States of AmericaB2
ES2294112T3SpainT3
DE60222391T2GermanyT2
CN100437883CChinaC