Process control in electro-chemical mechanical polishing

A detection grinding end point of system and method. Generally speaking, a power supply of claims to an electrolytic polishing system, the power supply three a motor via the electrolyte. The monitoring is provided with a signal of the power supply the signal, a fixed a grinding end part. Secondary use explain, wherein the signal said of the monitoring comprises a motor and a voltage. The other implementation examples, element and detachment sand with the relevance, at the same time is monitors the current fixed to the detachment sand total section in the process.