Integration of fault detection with run-to-run control

The actuating processing system semiconductor wafer on of light using operation of the controller and monitoring detection system. Used in inspection tool of the manufacturing actuating system for menu is operation of operation controller. The menu used for obtaining one or more target chip the setpoint. The - processing for monitoring chip is the operation fault testing system and one or more sensor measuring processing attribute, processing at a fault condition and chip. A revise the menu in operation of operation controller according to the processing at the setpoint to maintain the target chip, the external a monitoring detection system for detecting state fault is next. , So unreadable and is used for feeding back the target in the data of a tool or a chip state fault information. A clock, and operating fault detecting model determined for represents a fault state conditions range. The situations, a revise the fault detecting mould, order to merge and parameter of operation of the menu setpoint for operation methods and apparatus for modifying controller.