Gallium nitride materials and methods for forming layers thereof
Abstract
The present invention offers the method for forming the semiconducting material containing the gallium nitride material layer currently formed on the silicon substrate, and its semiconducting material. This semiconducting material contains the transition layer formed between the silicon substrate and the gallium nitride material layer. A composition slope is attached in order for this transition layer to reduce the stress in the gallium nitride material layer which may be produced from the difference of the coefficient of thermal expansion between gallium nitride material and a substrate. If the stress in a gallium nitride material layer is reduced, the tendency which a crack generates will decrease. Therefore, the present invention enables manufacture of the semiconducting material containing the gallium nitride material layer which does not almost have a crack or is not. This semiconducting material may be used for many microelectronics uses and optical uses. [Selection figure] Fig. 1
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
41 members in 8 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 73697200 | United States of America | A | |
| 73697200 | United States of America | A | |
| 736972 | – | – | – |
| US20000736972 | – | – | – |
Members41
| Document | Office | Kind | |
|---|---|---|---|
| US2002074552A1 | United States of America | A1 | |
| WO0248434A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU3086802A | Australia | A | |
| US2002187356A1 | United States of America | A1 | |
| WO0248434A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US6617060B2 | United States of America | B2 | |
| EP1343927A2 | European Patent Office (EPO) | A2 | |
| US6649287B2 | United States of America | B2 | |
| US2004119067A1 | United States of America | A1 | |
| JP2004524250A | Japan | A | |
| TWI257142B | Taiwan Province of China | B | |
| EP1343927B1 | European Patent Office (EPO) | B1 | |
| AT360713TThis record | Austria | T | |
| DE60128134D1 | Germany | D1 | |
| DE60128134T2 | Germany | T2 | |
| US2009104758A1 | United States of America | A1 | |
| US8105921B2 | United States of America | B2 | |
| US2012119223A1 | United States of America | A1 | |
| US8344417B2 | United States of America | B2 | |
| US2013112990A1 | United States of America | A1 | |
| US8592862B2 | United States of America | B2 | |
| US2014077222A1 | United States of America | A1 | |
| US2014097446A1 | United States of America | A1 | |
| US2014131659A1 | United States of America | A1 | |
| US2014353680A1 | United States of America | A1 | |
| US8928034B2 | United States of America | B2 | |
| US8928035B2 | United States of America | B2 | |
| US8937335B2 | United States of America | B2 | |
| US2015108495A1 | United States of America | A1 | |
| US9064775B2 | United States of America | B2 | |
| US2015187880A1 | United States of America | A1 | |
| US2015287792A1 | United States of America | A1 | |
| US2016126315A1 | United States of America | A1 | |
| US9437686B2 | United States of America | B2 | |
| US9437687B2 | United States of America | B2 | |
| US9461119B2 | United States of America | B2 | |
| US2017047407A1 | United States of America | A1 | |
| US10177229B2 | United States of America | B2 | |
| US2019214468A1 | United States of America | A1 | |
| US2019229190A1 | United States of America | A1 | |
| US2020243651A9 | United States of America | A9 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Publication, DOCDB
- 360713
- Publication, EPODOC
- AT360713T
- Application
- 1991120
- Application, DOCDB
- 01991120
- Application, EPODOC
- AT20010991120T
Titles2
- German
- GALLIUM NITRID MATERIALEN UND VERFAHREN ZUR HERSTELLUNG VON SCHICHTEN DIESER MATERIALEN
- English
- GALLIUM NITRIDE MATERIALS AND METHOD FOR PRODUCING LAYERS OF THIS MATERIAL
Classification
- CPC, 42
- C30B23/02
- H01L29/155
- C30B25/02
- C30B25/18
- C30B29/403
- C30B29/406
- H01L21/02381
- H01L21/0243
- H01L21/02433
- H01L21/02458
- H01L21/02507
- H01L21/0251
- H01L21/0254
- H01L33/007
- H01L21/0262
- H01L33/32
- Y10T428/24942
- Y10T428/26
- Y10T428/265
- H01L29/7786
- C30B23/025
- H01L29/2003
- C30B25/183
- C30B29/06
- C30B29/68
- H01L21/02422
- H01L21/0245
- H01L21/02598
- H01L29/205
- H01L29/04
- H01L29/225
- H01L29/045
- H01L29/0649
- H01L33/0066
- H01L33/0075
- H01L29/201
- H01L33/12
- H01L29/66462
- H01L29/7787
- H01L29/78
- H01L33/04
- H01L33/06
- IPC, 11
- C30B29 38
- C23C16 34
- C30B23 02
- C30B25 02
- C30B25 18
- H01L21 20
- H01L21 205
- H01L33 00
- H01L33 32
- H01S5 323
- H01S5 343