Heterostructure with rear-face donor doping

(57) The channel by which summary book invention was prepared on the buffer layer or the substrate, and a buffer or a substrate, Have the cap layer prepared on the channel and a channel consists of a piezo-electric polarization substance, The domain near the border plane between a buffer or a substrate, and a channel or the domain near the border plane between a channel and a cap layer is related with the hetero structure doped so that the piezo-electric electric charge generated at each border plane may be compensated.