Method of producing a plate-shaped structure, in particular, from silicon, use of said method and plate-shaped structure thus produced, in particular from silicon

The invention claims a sheet-shaped structure and method, and thereby forming laminated structure of manufacturing, wherein a groove laminated structure for silicon is made. Structure of this invention includes at least substrate (2), a covering layer (3) and at least configuration and covering layer (4) in the middle layer between substrate. The middle layer (4) includes at least a substrate, a distribution the non-inherent part or the atom on the substrate; the non-inherent part or the atom are different from a substrate the part or the atom. To the invention, the piece applying heat - treatment, so on heat - treatment the temperature range, the middle layer (4) is a plastic operation, connected with the substrate and second of existence non-inherent macromolecule or atom with soak or a micro cavity (7) irreversible formed in the middle layer.