Active nems arrays for biochemical analyses

The nano electronic machine element (biotechnology NEMS) functionalized biologically for detecting the single molecule in solution is offered by measuring change of mechanical displacement of the bio-NEMS element of Hazama to whom combination takes place. The element of the nano electronic machine according to the present invention functionalized biologically contains the detector which was united with the mechanical resonance machine for usually measuring mechanical displacement of a nano electronic machine resonator and the resonator concerned, and the electronic device connected to the detector for telling a user a result. The method of using the element of the nano electronic machine with which the system of the element of the nano electronic machine functionalized biologically and the present invention were functionalized biologically is also offered.