AT339313T

Piezoelectric structure, liquid ejecting head and manufacturing method therefor

Abstract

A piezoelectric structure, comprising: A vibration platform; A piezoelectric film; The vibration platform comprising a set of material and polycrystal material, connected with formed unit crystal element material different element unit of material, or connected with formed polycrystal material element different element one of a polycrystalline material, and a clamping the upper layer of the middle scale layer, the piezoelectric film with the vehicle-front or crystal or a unit crystal structure.

Term

No projected expiry on record.

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16 members in 7 offices

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Priority claims
DocumentOfficeKindDate
2001033823JapanA

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DocumentOfficeKind
EP1231061A1European Patent Office (EPO)A1
KR20020066226ARepublic of KoreaA
JP2002234156AJapanA
US2002140320A1United States of AmericaA1
CN1380187AChinaA
CN1181977CChinaC
US2006028100A1United States of AmericaA1
US7053526B2United States of AmericaB2
US7069631B2United States of AmericaB2
EP1231061B1European Patent Office (EPO)B1
JP3833070B2JapanB2
AT339313TThis recordAustriaT
ATE339313T1AustriaT1
DE60214612D1GermanyD1
KR100715406B1Republic of KoreaB1
DE60214612T2GermanyT2