AT321899T
Method for making carbon doped oxide film
Abstract
The deposition and carbon dioxide (CDO). The deposition method, comprising providing substrate; As in the presence of a substrate, to the oxygen is arranged in the carbon oxide precursor. Mixed carbon dioxide film to form a substrate. The other, wherein the substrate is detect of the chemical gas phase depositing device is. The auxiliary accompanies gas is mixed carbon precursor oxide and oxygen is manipulated,) is formed to produce the carbon dioxide film on the substrate.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
13 members in 8 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 97222801 | United States of America | A |
Members13
| Document | Office | Kind | |
|---|---|---|---|
| WO03031676A1 | World Intellectual Property Organization (WIPO) | A1 | |
| US2003077921A1 | United States of America | A1 | |
| US6677253B2 | United States of America | B2 | |
| US2004043555A1 | United States of America | A1 | |
| EP1432843A1 | European Patent Office (EPO) | A1 | |
| CN1723295A | China | A | |
| EP1432843B1 | European Patent Office (EPO) | B1 | |
| AT321899TThis record | Austria | T | |
| ATE321899T1 | Austria | T1 | |
| DE60210337D1 | Germany | D1 | |
| MY122888A | Malaysia | A | |
| DE60210337T2 | Germany | T2 | |
| TWI297738B | Taiwan Province of China | B |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 2800893
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES FILMS AUS KOHLENSTOFFDOTIERTEM OXID
- English
- METHOD FOR PRODUCING A FILM OF CARBON DOTTED OXIDE
Classification
- CPC, 5
- H01L21/02126
- C23C16/401
- H01L21/02216
- H01L21/02274
- H01L21/31633
- IPC, 3
- C23C16 40
- H01L21 316
- H01L21 768