AT32105T
Rapid rate reactive sputtering of a group ivb metal
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
11 members in 7 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 48195383 | United States of America | A |
Members11
| Document | Office | Kind | |
|---|---|---|---|
| US4428811A | United States of America | A | |
| EP0121019A2 | European Patent Office (EPO) | A2 | |
| AU2047083A | Australia | A | |
| JPS59185776A | Japan | A | |
| EP0121019A3 | European Patent Office (EPO) | A3 | |
| CA1198084A | Canada | A | |
| AU565327B2 | Australia | B2 | |
| EP0121019B1 | European Patent Office (EPO) | B1 | |
| AT32105TThis record | Austria | T | |
| ATE32105T1 | Austria | T1 | |
| DE3375406D1 | Germany | D1 |
3 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Patent revokedRevokedRZN | RZN | |
| Ceased due to non-payment of the annual feeCeasedREN | REN | |
| Publication of translation of european patent specificationUEP | UEP |
Numbers
- Application
- 83306545
Titles2
- German
- REAKTIVE KATHODENZERSTAEUBUNG EINES METALLES DER GRUPPE 4A BEI HOHER GESCHWINDIGKEIT.
- English
- REACTIVE CATALOD DEGRADATION OF A METAL OF GROUP 4A AT HIGH SPEED.
Classification
- IPC, 4
- C23C14 00
- C23C14 06
- C23C14 34
- H01J37 34