Nova Patents
AT320661T

Method of removing particles and a liquid from a surface of substrate

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

55 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
5992997United States of AmericaP
6616497United States of AmericaP

Members55

Family members, oldest first
DocumentOfficeKind
EP0867924A2European Patent Office (EPO)A2
EP0905746A1European Patent Office (EPO)A1
EP0905747A1European Patent Office (EPO)A1
EP0905748A1European Patent Office (EPO)A1
WO9916109A1World Intellectual Property Organization (WIPO)A1
JPH11219926AJapanA
JPH11233481AJapanA
EP0867924A3European Patent Office (EPO)A3
EP0970511A1European Patent Office (EPO)A1
JP2001506061AJapanA
US6261377B1United States of AmericaB1
US2001022186A1United States of AmericaA1
US2001042559A1United States of AmericaA1
US6334902B1United States of AmericaB1
US2002011257A1United States of AmericaA1
JP2002124501AJapanA
US6398975B1United States of AmericaB1
US2002088478A1United States of AmericaA1
US2002125212A1United States of AmericaA1
US2002130106A1United States of AmericaA1
US2002148483A1United States of AmericaA1
US6491764B2United States of AmericaB2
US6551409B1United States of AmericaB1
US6568408B2United States of AmericaB2
US6676765B2United States of AmericaB2
US2004045589A1United States of AmericaA1
US6821349B2United States of AmericaB2
EP0970511B1European Patent Office (EPO)B1
AT287126TAustriaT
ATE287126T1AustriaT1
US6851435B2United States of AmericaB2
DE69828592D1GermanyD1
EP0905747B1European Patent Office (EPO)B1
AT311665TAustriaT
ATE311665T1AustriaT1
DE69832567D1GermanyD1
EP0905748B1European Patent Office (EPO)B1
DE69828592T2GermanyT2
AT320661TThis recordAustriaT
ATE320661T1AustriaT1
DE69833847D1GermanyD1
DE69828592T8GermanyT8
DE69833847T2GermanyT2
DE69832567T2GermanyT2
US2007077769A1United States of AmericaA1
JP4017680B2JapanB2
JP2008288604AJapanA
US7527698B2United States of AmericaB2
JP4477704B2JapanB2
JP4616948B2JapanB2
JP4634490B2JapanB2
EP0867924B1European Patent Office (EPO)B1
AT522926TAustriaT
ATE522926T1AustriaT1
JP4931285B2JapanB2