Pyrotechnic microactuators for microsystems

Microactuator (1, 60) comprising a chamber (2, 63) made in the form of cavity in a solid support (3) and containing a pyrotechnic charge (6), said chamber (2, 63) being delimited in part by a membrane (4, 62) deformable so that the gases emitted by combustion of the pyrotechnic charge (6) allow to increase the volume of said chamber (2, 63) by deformation of said membrane (4, 62), keeping intact the walls solid chamber (2, 63) characterized in that the pyrotechnic charge (6) is deposited on a heater driver and has a thickness of less than 200 .mu.m deposit.