AT309547T
Fritting inspection method and apparatus
Abstract
The present invention is an insulating film of the inspection electrode (P) by electrical contact with the probe (12A) for checking in the test method for performing electrical characteristics tests on the device, by using a fritting phenomenon to the electrode (P) for the test ( O) destroying, scan probe (12A) and the step of electrically contacting the contact electrode (P) and the inspection is disclosed.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
24 members in 7 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 2000249702 | Japan | A | |
| 2001093303 | Japan | A |
Members24
| Document | Office | Kind | |
|---|---|---|---|
| US2002021142A1 | United States of America | A1 | |
| EP1182460A2 | European Patent Office (EPO) | A2 | |
| KR20020015294A | Republic of Korea | A | |
| JP2002139542A | Japan | A | |
| TW497194B | Taiwan Province of China | B | |
| EP1182460A3 | European Patent Office (EPO) | A3 | |
| US6777967B2 | United States of America | B2 | |
| US2004174177A1 | United States of America | A1 | |
| EP1182460B1 | European Patent Office (EPO) | B1 | |
| AT309547TThis record | Austria | T | |
| ATE309547T1 | Austria | T1 | |
| DE60114730D1 | Germany | D1 | |
| US7061259B2 | United States of America | B2 | |
| KR20060066165A | Republic of Korea | A | |
| DE60114730T2 | Germany | T2 | |
| US2006192578A1 | United States of America | A1 | |
| US2007229101A1 | United States of America | A1 | |
| US7304489B2 | United States of America | B2 | |
| US7319339B2 | United States of America | B2 | |
| KR20080077952A | Republic of Korea | A | |
| KR20100018603A | Republic of Korea | A | |
| KR20110004346A | Republic of Korea | A | |
| JP4841737B2 | Japan | B2 | |
| KR101132904B1 | Republic of Korea | B1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 1119644
Titles2
- German
- INSPEKTIONSVERFAHREN UND -VORRICHTUNG DURCH SINTERUNG
- English
- INSPECTION PROCESS AND DEVICE THROUGH SINTERING
Classification
- CPC, 5
- G01R31/2891
- G01R1/067
- G01R1/06794
- G01R3/00
- G01R31/2886
- IPC, 6
- G01N27 30
- G01R1 06
- G01R1 067
- G01R31 26
- G01R31 28
- H01L21 66