Nova Patents
AT303872T

Method and apparatus for spin-coating chemicals

Abstract

(57) The equipment (100) and the method for carrying out spin coating of the summary chemicals on the field of the circuit board (130) are indicated. A ball (102) for this equipment to support the circuit board (130), In order to supply the lid (101) and solvent which have a flat side which suits the excretory pore of a large number formed below the level of the circuit board (130), and a ball (102) below the circuit board, the injection hole (121) of a large number formed in the ball (102) is included. The injection hole (121) of these large number is formed along with an injection ring (227), this injection ring is formed so that a liquid solvent may be received and it may supply near the perimeter edge of the circuit board bottom, and this injection ring (227) is separated below the circuit board (130).

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

14 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
DocumentOfficeKindDate
86683297United States of AmericaA
86683497United States of AmericaA
9810958United States of AmericaW

Members14

Family members, oldest first
DocumentOfficeKind
WO9853923A1World Intellectual Property Organization (WIPO)A1
AU7803498AAustraliaA
US5908661AUnited States of AmericaA
US5916631AUnited States of AmericaA
TW391893BTaiwan Province of ChinaB
EP1015136A1European Patent Office (EPO)A1
JP2002502309AJapanA
EP1015136A4European Patent Office (EPO)A4
EP1015136B1European Patent Office (EPO)B1
AT303872TThis recordAustriaT
ATE303872T1AustriaT1
DE69831496D1GermanyD1
DE69831496T2GermanyT2
JP4108767B2JapanB2