Method and apparatus for fabrication of a DLC layer system

layer system for the Wear protection, Corrosion protection and improve the sliding characteristics with an adhesive layer on a substrate, a transition layer on the adhesive layer and a cover layer of diamond-like carbon, the adhesive layer of at least one element of the 4th, 5th and / or 6th Subgroup and / or silicon, the transition layer of carbon and at least one element of the 4th, 5th and / or 6th transition group and / or silicon, and the top layer consists essentially of diamond-like Carbon, wherein the layer system has a hardness of has at least 15 GPa and an adhesive strength of at least 3 HF.