Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production

(57) Summary book invention offers the system and method of depositing the improved diamond Mr. Carbon material especially on manufacture of a magnetic recording medium. The diamond Mr. Carbon material of the present invention is an advanced tetrahedron, i. E. , it is characterized by many sp carbon * carbon combination found out in a diamond crystalline lattice. Material offers the combination of the order of the range amorphous and short again, and the order of the long range, and may deposit it as an overly smooth and continuous film in small thickness more substantially than the well-known charge of an amorphous carbon coating material. Carbon protection coating of the present invention is often hydrogenated. In the suitable method of depositing such materials, capacitive coupling forms the uniform and alternatively excited highly, ion stream from the high-density and inductively ionized plasma. Such guidance ionization improves by the magnetic field (or -- "-- semi- static") which promotes resonance ionization and uniformity of an ion beam and which moves comparatively late.