Resonant probe driving arrangement and scanning probe microscope

(57) The driver system for resonated type probe devices, such as summary scanning probe microscopy, is offered. The amplitude of a drive signal is controlled by feeding back the ingredient which the phase shift of the oscillating amplitude of a resonance element was carried out, and was amplified. When it is made to operate in liquid environment, the means for raising the quality factor of a resonated type probe device electronically is established. The sensitivity of a probe device is improved by improvement in such a quality factor.