Scanning unit for an optical position measuring device
Abstract
In a scanning unit for an optical position measuring device comprising a structured optoelectronic photodetector, which comprises a plurality of adjacently arranged on a common semiconductor substrate radiation sensitive detector regions D and I1-I6, which are connected via conductor paths L1-L8 with an evaluation device, which conductor tracks are L1-L8 passed over the surface of the detector areas D and I1-I6, and with associated detector regions or sub-areas detector D; I1-I6, provide the in-phase scanning signals, respectively. This allows the detector regions D or I1-I6 occupy a maximum area and extends up to the side edges 61, 62 of the photodetector (Fig. 4).
Term
Term ended
Expired 27 April 2021, 5.4 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
17 members in 6 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 10022619 | Germany | A | |
| 0101672 | Germany | W |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| WO0184083A1 | World Intellectual Property Organization (WIPO) | A1 | |
| DE10022619A1 | Germany | A1 | |
| EP1279004A1 | European Patent Office (EPO) | A1 | |
| JP2003532098A | Japan | A | |
| US2004119989A1 | United States of America | A1 | |
| EP1507131A2 | European Patent Office (EPO) | A2 | |
| EP1279004B1 | European Patent Office (EPO) | B1 | |
| AT291218TThis record | Austria | T | |
| ATE291218T1 | Austria | T1 | |
| DE50105625D1 | Germany | D1 | |
| US7214928B2 | United States of America | B2 | |
| EP1507131A3 | European Patent Office (EPO) | A3 | |
| JP4526003B2 | Japan | B2 | |
| EP1507131B1 | European Patent Office (EPO) | B1 | |
| AT505713T | Austria | T | |
| ATE505713T1 | Austria | T1 | |
| DE50115852D1 | Germany | D1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN |
Numbers
- Application
- 1936033
Titles2
- German
- ABTASTEINHEIT FÜR EINE OPTISCHE POSITIONSMESSEINRICHTUNG
- English
- ABTASTE UNIT FOR AN OPTICAL POSITION MEASURING DEVICE
Classification
- CPC, 5
- H01L31/02005
- G01D5/34715
- G01D5/34746
- H01L31/02024
- H01L31/103
- IPC, 7
- G01D5 30
- G01B11 00
- G01D5 26
- G01D5 347
- H01L31 02
- H01L31 103
- H01L31 12