AT282839T

Method of manufacture of a micromechanical optical switch

Abstract

Provided with improved the MEMS-based the optical switch (100), and method for manufacturing such the optical switch. According to one embodiment, an optical switch comprises a to displace Beam Jiegou (124) close (122) is composed of a driving unit of (104) and a driving unit coupling lens (102). The lens, a whole between the wave guide slot (106) extends and position is one end of the wave guide the shrinking to move. The driving unit flow force is a Beam of Jiegou position or shrinking positions of a movable to displace and mirror, and is a to exert force, A Jiegou the lens a to the position of the position or shrinking position.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

27 members in 13 offices

This recordMember, by publication datePriority claim3 more offices are in the list below

Priority claims2

Priority claims
DocumentOfficeKindDate
37226599United States of AmericaA
0040532United States of AmericaW

Members27

Family members, oldest first
DocumentOfficeKind
CA2379179A1CanadaA1
WO0111411A1World Intellectual Property Organization (WIPO)A1
AU7389900AAustraliaA
US6229640B1United States of AmericaB1
WO0111411B1World Intellectual Property Organization (WIPO)B1
US2001008457A1United States of AmericaA1
NO20020675D0NorwayD0
TW475999BTaiwan Province of ChinaB
NO20020675LNorwayL
EP1208403A1European Patent Office (EPO)A1
IL148039D0IsraelD0
CN1370284AChinaA
WO0111411A9World Intellectual Property Organization (WIPO)A9
JP2003506755AJapanA
US6682871B2United States of AmericaB2
PL354707A1PolandA1
AU774240B2AustraliaB2
EP1208403B1European Patent Office (EPO)B1
AT282839TThis recordAustriaT
ATE282839T1AustriaT1
DE60015987D1GermanyD1
DE60015987T2GermanyT2
CN1226650CChinaC
PL200407B1PolandB1
IL148039AIsraelA
CA2379179CCanadaC
JP4456310B2JapanB2