AT266258T
Method of manufacturing a semiconductor article
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
21 members in 12 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 30453996 | Japan | A |
Members21
| Document | Office | Kind | |
|---|---|---|---|
| CA2220600A1 | Canada | A1 | |
| EP0843346A2 | European Patent Office (EPO) | A2 | |
| AU4517497A | Australia | A | |
| EP0843346A3 | European Patent Office (EPO) | A3 | |
| JPH10200079A | Japan | A | |
| KR19980042472A | Republic of Korea | A | |
| CN1191383A | China | A | |
| SG54593A1 | Singapore | A1 | |
| TW372366B | Taiwan Province of China | B | |
| US6054363A | United States of America | A | |
| KR100279756B1 | Republic of Korea | B1 | |
| CA2220600C | Canada | C | |
| AU745315B2 | Australia | B2 | |
| JP3293767B2 | Japan | B2 | |
| MY114469A | Malaysia | A | |
| CN1104036C | China | C | |
| EP0843346B1 | European Patent Office (EPO) | B1 | |
| AT266258TThis record | Austria | T | |
| ATE266258T1 | Austria | T1 | |
| DE69728950D1 | Germany | D1 | |
| DE69728950T2 | Germany | T2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 97309196
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERGEGENSTANDS
- English
- VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERGEGENSTANDS
Classification
- CPC, 2
- H01L21/304
- H01L21/76259
- IPC, 2
- H01L21 304
- H01L21 762