Plasma fluorine resistant alumina ceramic materials and methods of making thereof

(57) A summary and subject The polycrystal alumina ceramic material which shows the high tolerance over plasma fluoride, and shows reduction of particle generating is offered. Solution means The polycrystal alumina ceramic material which has tolerance in plasma fluoride is manufactured by the step which forms a non-sintered compact equipped with alumina and a binder, and the step which sinters this non-sintered compact for about 8*12 hours. In order that the area % of the unsintered particles in polycrystal alumina ceramic material may not exceed the 0.1 area %, generating of the particles after being exposed to plasma fluoride is reduced.