Nova Patents
AT235072T

Process for the removal of resist material

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

20 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
19299498JapanA
32379898JapanA

Members20

Family members, oldest first
DocumentOfficeKind
JPH11265075AJapanA
EP0971270A1European Patent Office (EPO)A1
JP2000029230AJapanA
TW429399BTaiwan Province of ChinaB
US6245188B1United States of AmericaB1
US2001015259A1United States of AmericaA1
EP1248156A2European Patent Office (EPO)A2
EP0971270B1European Patent Office (EPO)B1
AT235072TThis recordAustriaT
ATE235072T1AustriaT1
DE69905985D1GermanyD1
US6565704B2United States of AmericaB2
EP1248156A3European Patent Office (EPO)A3
ES2191387T3SpainT3
DE69905985T2GermanyT2
JP3959189B2JapanB2
EP1248156B1European Patent Office (EPO)B1
AT418750TAustriaT
ATE418750T1AustriaT1
DE69940168D1GermanyD1