Nova Patents
AT231046T

Apparatus and method for polishing substrates

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
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  3. Granted
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27 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims1

Priority claims
DocumentOfficeKindDate
54933695United States of AmericaA

Members27

Family members, oldest first
DocumentOfficeKind
EP0774323A2European Patent Office (EPO)A2
KR970023803ARepublic of KoreaA
JPH09174420AJapanA
EP0774323A3European Patent Office (EPO)A3
US5738574AUnited States of AmericaA
US6080046AUnited States of AmericaA
US6086457AUnited States of AmericaA
US6126517AUnited States of AmericaA
JP2002198329AJapanA
EP0774323B1European Patent Office (EPO)B1
AT231046TThis recordAustriaT
ATE231046T1AustriaT1
DE69625778D1GermanyD1
DE69625778T2GermanyT2
KR100395153B1Republic of KoreaB1
KR100412478B1Republic of KoreaB1
US2005048880A1United States of AmericaA1
US7097544B1United States of AmericaB1
US2006194525A1United States of AmericaA1
US7238090B2United States of AmericaB2
US7255632B2United States of AmericaB2
US2007238399A1United States of AmericaA1
JP2008078673AJapanA
US7614939B2United States of AmericaB2
US2010035526A1United States of AmericaA1
JP4641540B2JapanB2
US8079894B2United States of AmericaB2