Nova Patents
AT218752T

Method for examining and/or modifying surface structures of a sample

Abstract

(57) In the method of changing the method or the surface structure of a specimen (14) of inspecting the surface structure of a specimen (14) by the means of the beam (11) which collides on the surface structure of a summary specimen (14), Discontinuously, preferably, gas is pulse-like Mohd, and even if small on the surface structure of a specimen (14), it is supplied to the collision domain (13) of a beam (11).

Term

No projected expiry on record.

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20 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
19851622GermanyA
9908057European Patent Office (EPO)W

Members20

Family members, oldest first
DocumentOfficeKind
EP0969493A1European Patent Office (EPO)A1
EP0969494A1European Patent Office (EPO)A1
DE19851622A1GermanyA1
WO0028571A1World Intellectual Property Organization (WIPO)A1
WO0103145A1World Intellectual Property Organization (WIPO)A1
EP1114435A1European Patent Office (EPO)A1
US2002053638A1United States of AmericaA1
EP1114435B1European Patent Office (EPO)B1
AT218752TThis recordAustriaT
ATE218752T1AustriaT1
DE59901662D1GermanyD1
JP2002529902AJapanA
US6555815B2United States of AmericaB2
US6661005B1United States of AmericaB1
EP1455379A2European Patent Office (EPO)A2
EP1455379A3European Patent Office (EPO)A3
JP3921347B2JapanB2
EP1455379B1European Patent Office (EPO)B1
DE69937910D1GermanyD1
DE69937910T2GermanyT2