Method and device for heterodyne interferometer error correction

(57) Summary book invention relates to the method for detecting the periodic error of a heterodyne interferometer. For this reason, proofreading measurement of the fixed proofreading section divided into two section portions is repeated. One portion is measured by an interferometer here, the portion of another side is measured by additional distance measuring equipment, and this additional distance measuring equipment does not have a periodic error in the measurement section. The section portion measured by an interferometer before each proofreading measurement changes slightly, respectively. The 2nd section portion 相応s and changes to an opposite direction. The sum of section change of both the sections portion must 相応 a measurement light wavelength in optical distance length change of an interferometer at least. From the difference of the proofreading measurement result of the fixed proofreading section, a periodic error ingredient is separated and it is created for compensation of interferometric measurements with an arbitrary error curve depending on a wavelength.