Nova Patents
AT212735T

Flow regulator adaptable for use with exhaust from a process chamber.

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

107 members in 10 offices

This recordMember, by publication datePriority claim

Priority claims4

Priority claims
DocumentOfficeKindDate
66974691United States of AmericaA
66974691United States of AmericaA
669746–––
US19910669746–––

Members107

Family members, oldest first
DocumentOfficeKind
US5000221AUnited States of AmericaA
US5040741AUnited States of AmericaA
CA2106186A1CanadaA1
CA2106187A1CanadaA1
WO9216882A1World Intellectual Property Organization (WIPO)A1
WO9216883A1World Intellectual Property Organization (WIPO)A1
WO9216884A1World Intellectual Property Organization (WIPO)A1
WO9216885A1World Intellectual Property Organization (WIPO)A1
US5220940AUnited States of AmericaA
US5251654AUnited States of AmericaA
US5255709AUnited States of AmericaA
US5255710AUnited States of AmericaA
EP0575523A1European Patent Office (EPO)A1
EP0575533A1European Patent Office (EPO)A1
CA2145651A1CanadaA1
CA2145654A1CanadaA1
CA2272180A1CanadaA1
WO9410617A1World Intellectual Property Organization (WIPO)A1
WO9410618A1World Intellectual Property Organization (WIPO)A1
US5320124AUnited States of AmericaA
JPH06506291AJapanA
JPH06506553AJapanA
EP0575523A4European Patent Office (EPO)A4
EP0575533A4European Patent Office (EPO)A4
EP0667006A1European Patent Office (EPO)A1
EP0667007A1European Patent Office (EPO)A1
US5450873AUnited States of AmericaA
US5456280AUnited States of AmericaA
EP0667006A4European Patent Office (EPO)A4
EP0667007A4European Patent Office (EPO)A4
KR950704731ARepublic of KoreaA
KR950704732ARepublic of KoreaA
JPH08502813AJapanA
JPH08502816AJapanA
CA2208686A1CanadaA1
WO9623176A1World Intellectual Property Organization (WIPO)A1
US5582203AUnited States of AmericaA
US5597011AUnited States of AmericaA
US5634490AUnited States of AmericaA
US5655562AUnited States of AmericaA
US5664600AUnited States of AmericaA
EP0804708A1European Patent Office (EPO)A1
US5687760AUnited States of AmericaA
US5720314AUnited States of AmericaA
US5720315AUnited States of AmericaA
DE804708T1GermanyT1
KR19980701715ARepublic of KoreaA
CA2145654CCanadaC
EP0575523B1European Patent Office (EPO)B1
EP0575533B1European Patent Office (EPO)B1
EP0853266A2European Patent Office (EPO)A2
AT168479TAustriaT
AT168480TAustriaT
ATE168479T1AustriaT1
ATE168480T1AustriaT1
DE69226264D1GermanyD1
DE69226265D1GermanyD1
US5842502AUnited States of AmericaA
JPH10512949AJapanA
DE69226264T2GermanyT2
DE69226265T2GermanyT2
EP0853266A3European Patent Office (EPO)A3
EP0667006B1European Patent Office (EPO)B1
AT177544TAustriaT
ATE177544T1AustriaT1
DE69323891D1GermanyD1
KR100202431B1Republic of KoreaB1
KR100202432B1Republic of KoreaB1
CA2145651CCanadaC
DE69323891T2GermanyT2
JP3014143B2JapanB2
USRE36637EUnited States of AmericaE
EP0667007B1European Patent Office (EPO)B1
AT192586TAustriaT
ATE192586T1AustriaT1
DE69328564D1GermanyD1
DE69328564T2GermanyT2
ES2150478T3SpainT3
KR100298992B1Republic of KoreaB1
EP0804708B1European Patent Office (EPO)B1
AT210805TAustriaT
ATE210805T1AustriaT1
EP1174783A1European Patent Office (EPO)A1
DE69617906D1GermanyD1
EP0853266B1European Patent Office (EPO)B1
JP3256228B2JapanB2
AT212735TThis recordAustriaT
ATE212735T1AustriaT1
DE69232399D1GermanyD1
DE69617906T2GermanyT2
DE69232399T2GermanyT2
KR100336811B1Republic of KoreaB1
KR100355480B1Republic of KoreaB1
CA2106187CCanadaC
CA2106186CCanadaC
JP2003028480AJapanA
JP3400802B2JapanB2
JP3419776B2JapanB2
KR100396968B1Republic of KoreaB1
JP3602138B2JapanB2
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