AT199049T
Method of obtaining high quality silicon dioxide passivation on silicon carbide
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
27 members in 10 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 89364292 | United States of America | A | |
| 20523093 | Japan | A |
Members27
| Document | Office | Kind | |
|---|---|---|---|
| EP0637069A1 | European Patent Office (EPO) | A1 | |
| JPH0766192A | Japan | A | |
| US5459107A | United States of America | A | |
| US5612260A | United States of America | A | |
| US5629531A | United States of America | A | |
| CA2251737A1 | Canada | A1 | |
| WO9739485A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU2667597A | Australia | A | |
| US5776837A | United States of America | A | |
| EP0894339A1 | European Patent Office (EPO) | A1 | |
| KR20000005452A | Republic of Korea | A | |
| JP2000508477A | Japan | A | |
| JP3060434B2 | Japan | B2 | |
| EP0637069B1 | European Patent Office (EPO) | B1 | |
| AT199049TThis record | Austria | T | |
| ATE199049T1 | Austria | T1 | |
| DE69329905D1 | Germany | D1 | |
| DE69329905T2 | Germany | T2 | |
| ES2155828T3 | Spain | T3 | |
| US6344663B1 | United States of America | B1 | |
| EP0894339B1 | European Patent Office (EPO) | B1 | |
| AT262733T | Austria | T | |
| ATE262733T1 | Austria | T1 | |
| DE69728259D1 | Germany | D1 | |
| DE69728259T2 | Germany | T2 | |
| ES2213822T3 | Spain | T3 | |
| CA2251737C | Canada | C |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 93306024
Titles2
- German
- VERFAHREN ZUR ERZEUGUNG VON SILIZIUM-DIOXID- PASSIVIERUNG HOHER QUALITÄT AUF SILIZIUM-CARBID
- English
- METHOD OF GENERATING HIGH QUALITY SILICON DIOXIDE PASSIVATION ON SILICON CARBIDE
Classification
- CPC, 12
- H01L29/1608
- H01L21/045
- H01L21/049
- H01L23/3171
- H01L29/51
- H01L29/517
- H01L29/6606
- H01L29/66068
- H01L29/78
- H01L2924/0002
- H01L2924/13091
- Y10S438/958
- IPC, 8
- H01L21 04
- H01L21 316
- H01L21 473
- H01L23 31
- H01L29 24
- H01L29 51
- H01L29 78
- H01L29 864