AT183251T
Method for lowering the phase transformation temperature of a metal silicide
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
18 members in 10 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 14592193 | United States of America | A |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| CA2118147A1 | Canada | A1 | |
| EP0651076A1 | European Patent Office (EPO) | A1 | |
| KR950011644A | Republic of Korea | A | |
| BR9404247A | Brazil | A | |
| JPH07169711A | Japan | A | |
| TW262573B | Taiwan Province of China | B | |
| US5510295A | United States of America | A | |
| JP2673103B2 | Japan | B2 | |
| US5828131A | United States of America | A | |
| KR0155587B1 | Republic of Korea | B1 | |
| EP0651076B1 | European Patent Office (EPO) | B1 | |
| AT183251TThis record | Austria | T | |
| DE69420004D1 | Germany | D1 | |
| ES2136148T3 | Spain | T3 | |
| DE69420004T2 | Germany | T2 | |
| CA2118147C | Canada | C | |
| TW418464B | Taiwan Province of China | B | |
| US6187679B1 | United States of America | B1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 94115744
Titles2
- German
- VERFAHREN ZUR SENKUNG DER PHASENÜBERGANGSTEMPERATUR EINES METALLSILIZIDS
- English
- METHOD FOR REDUCING PHASE-TRANSITION TEMPERATURE OF METAL SILICIDE
Classification
- CPC, 6
- C30B1/02
- C30B29/10
- H01L21/28518
- H01L29/665
- Y10S148/04
- Y10S148/147
- IPC, 5
- C23C20 02
- C30B1 02
- H01L21 28
- H01L21 285
- H01L21 336