AT166747T
Method for preparing semiconductor member.
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
17 members in 9 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 21314991 | Japan | A | |
| 21315091 | Japan | A |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| CA2075020A1 | Canada | A1 | |
| JPH0536951A | Japan | A | |
| JPH0536952A | Japan | A | |
| EP0528229A2 | European Patent Office (EPO) | A2 | |
| CN1073550A | China | A | |
| TW211621B | Taiwan Province of China | B | |
| US5374581A | United States of America | A | |
| EP0528229A3 | European Patent Office (EPO) | A3 | |
| KR950009617B1 | Republic of Korea | B1 | |
| EP0528229B1 | European Patent Office (EPO) | B1 | |
| AT166747TThis record | Austria | T | |
| DE69225650D1 | Germany | D1 | |
| CA2075020C | Canada | C | |
| DE69225650T2 | Germany | T2 | |
| CN1042375C | China | C | |
| JP3112100B2 | Japan | B2 | |
| JP3112101B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 92112985
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERSUBSTRATES
- English
- METHOD FOR PRODUCING A SEMICONDUCTOR SUBSTRATE
Classification
- CPC, 11
- H01L21/76256
- H01L21/0203
- H01L21/02381
- H01L21/0242
- H01L21/02532
- H01L21/0262
- H01L21/02658
- H01L21/76251
- H01L31/1892
- Y02E10/50
- Y10S148/012
- IPC, 4
- H01L21 20
- H01L21 306
- H01L21 762
- H01L31 18