AT150555T
Lithographic technique using laser scanning for fabrication of electronic components and the like
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
24 members in 7 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 36971489 | United States of America | A |
Members24
| Document | Office | Kind | |
|---|---|---|---|
| EP0256938A2 | European Patent Office (EPO) | A2 | |
| KR880003410A | Republic of Korea | A | |
| JPS63134679A | Japan | A | |
| US4877480A | United States of America | A | |
| CA2018262A1 | Canada | A1 | |
| EP0404340A2 | European Patent Office (EPO) | A2 | |
| CA1279104C | Canada | C | |
| KR910001908A | Republic of Korea | A | |
| EP0256938A3 | European Patent Office (EPO) | A3 | |
| JPH03135568A | Japan | A | |
| EP0404340A3 | European Patent Office (EPO) | A3 | |
| US5221422A | United States of America | A | |
| CA2018262C | Canada | C | |
| KR940007801B1 | Republic of Korea | B1 | |
| EP0256938B1 | European Patent Office (EPO) | B1 | |
| JPH0791661B2 | Japan | B2 | |
| DE3751551D1 | Germany | D1 | |
| DE3751551T2 | Germany | T2 | |
| KR960015787B1 | Republic of Korea | B1 | |
| EP0404340B1 | European Patent Office (EPO) | B1 | |
| AT150555TThis record | Austria | T | |
| DE69030215D1 | Germany | D1 | |
| DE69030215T2 | Germany | T2 | |
| JP2714475B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 90305359
Titles2
- German
- LITHOGRAPHISCHES LASERABTASTVERFAHREN FÜR DIE HERSTELLUNG ELEKTRONISCHER UND ÄHNLICHER KOMPONENTEN
- English
- LITHOGRAPHIC LASER ATTACHMENT METHOD FOR THE MANUFACTURE OF ELECTRONIC AND SIMILAR COMPONENTS
Classification
- CPC, 4
- G03F7/70358
- G03F7/2006
- G03F7/70858
- G03F7/70875
- IPC, 5
- B23K26 00
- G03F7 20
- G11B5 31
- H01L21 027
- H01L21 30