AT146010T

Device and procedure for vacuum evaporation of a material, plasma arc device and utilisation of the procedure

Abstract

(57) A summary and the purpose It aims at stabilizing light it for it and and guiding the arc which evaporates this substance to the target which has at least a high melting point substance which should evaporate a target surface. Composition A target surface is equipped with the electron gun or laser which generates local steamy clouds or the small point of a substance of having made it 溶融 (ing), and it constitutes so that the small point of an arc may be lit and may be guided by this.

Term

No projected expiry on record.

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11 members in 7 offices

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Priority claims
DocumentOfficeKindDate
4006456GermanyA
4006458GermanyA

Members11

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DocumentOfficeKind
DE4006456C1GermanyC1
EP0444538A2European Patent Office (EPO)A2
KR910016959ARepublic of KoreaA
EP0444538A3European Patent Office (EPO)A3
US5238546AUnited States of AmericaA
JPH0641727AJapanA
EP0444538B1European Patent Office (EPO)B1
AT146010TThis recordAustriaT
DE59108387D1GermanyD1
ES2095880T3SpainT3
EP0444538B2European Patent Office (EPO)B2