AT146010T
Device and procedure for vacuum evaporation of a material, plasma arc device and utilisation of the procedure
Abstract
(57) A summary and the purpose It aims at stabilizing light it for it and and guiding the arc which evaporates this substance to the target which has at least a high melting point substance which should evaporate a target surface. Composition A target surface is equipped with the electron gun or laser which generates local steamy clouds or the small point of a substance of having made it 溶融 (ing), and it constitutes so that the small point of an arc may be lit and may be guided by this.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
11 members in 7 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 4006456 | Germany | A | |
| 4006458 | Germany | A |
Members11
| Document | Office | Kind | |
|---|---|---|---|
| DE4006456C1 | Germany | C1 | |
| EP0444538A2 | European Patent Office (EPO) | A2 | |
| KR910016959A | Republic of Korea | A | |
| EP0444538A3 | European Patent Office (EPO) | A3 | |
| US5238546A | United States of America | A | |
| JPH0641727A | Japan | A | |
| EP0444538B1 | European Patent Office (EPO) | B1 | |
| AT146010TThis record | Austria | T | |
| DE59108387D1 | Germany | D1 | |
| ES2095880T3 | Spain | T3 | |
| EP0444538B2 | European Patent Office (EPO) | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN |
Numbers
- Application
- 91102573
Titles2
- German
- VORRICHTUNG UND VERFAHREN ZUM VERDAMPFEN VON MATERIAL IM VAKUUM SOWIE ANWENDUNG DES VERFAHRENS
- English
- DEVICE AND METHOD FOR EVAPORATING MATERIAL IN THE VACUUM AND USE OF THE PROCESS
Classification
- CPC, 3
- C23C14/325
- C23C14/28
- C23C14/30
- IPC, 7
- C23C14 24
- C23C14 28
- C23C14 30
- C23C14 32
- H01J37 305
- H01J37 32
- H01L21 203