AT138696T
Improved magnetron sputtering cathode
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
11 members in 7 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 27110088 | United States of America | A | |
| 33624389 | United States of America | A |
Members11
| Document | Office | Kind | |
|---|---|---|---|
| US4865708A | United States of America | A | |
| US4892633A | United States of America | A | |
| CA2002898A1 | Canada | A1 | |
| WO9005793A1 | World Intellectual Property Organization (WIPO) | A1 | |
| EP0442939A1 | European Patent Office (EPO) | A1 | |
| EP0442939A4 | European Patent Office (EPO) | A4 | |
| JPH04501585A | Japan | A | |
| EP0442939B1 | European Patent Office (EPO) | B1 | |
| AT138696TThis record | Austria | T | |
| DE68926573D1 | Germany | D1 | |
| DE68926573T2 | Germany | T2 |
Numbers
- Application
- 89912816
Titles2
- German
- KATHODE ZUM MAGNETRONSPUTTERN
- English
- CATHODE FOR MAGNETIC RON SPUTTERING
Classification
- CPC, 3
- H01J37/3408
- C23C14/3407
- H01J37/347
- IPC, 3
- C23C14 34
- C23C14 35
- H01J37 34