Nova Patents
AT138696T

Improved magnetron sputtering cathode

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

11 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
27110088United States of AmericaA
33624389United States of AmericaA

Members11

Family members, oldest first
DocumentOfficeKind
US4865708AUnited States of AmericaA
US4892633AUnited States of AmericaA
CA2002898A1CanadaA1
WO9005793A1World Intellectual Property Organization (WIPO)A1
EP0442939A1European Patent Office (EPO)A1
EP0442939A4European Patent Office (EPO)A4
JPH04501585AJapanA
EP0442939B1European Patent Office (EPO)B1
AT138696TThis recordAustriaT
DE68926573D1GermanyD1
DE68926573T2GermanyT2