AT136947T
Method for producing CVD diamond film.
Abstract
(57) A summary and the purpose Process by which the diamond film which does not almost have the crack or fragmentation induced by heat stress was improved. Composition In the chemical vapor deposition for manufacturing the diamond film which does not include substantially the crack induced by the heat stress of the present invention, A diamond is grown up into both sides of a thin substrate, and two diamond tunics with the equal tension power which counters are formed in both sides of a substrate by thickness thicker than the thickness of a thin substrate.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
10 members in 8 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 80639391 | United States of America | A |
Members10
| Document | Office | Kind | |
|---|---|---|---|
| CA2082729A1 | Canada | A1 | |
| EP0546754A1 | European Patent Office (EPO) | A1 | |
| KR930013198A | Republic of Korea | A | |
| ZA929233B | South Africa | B | |
| JPH05306194A | Japan | A | |
| US5286524A | United States of America | A | |
| EP0546754B1 | European Patent Office (EPO) | B1 | |
| AT136947TThis record | Austria | T | |
| DE69209990D1 | Germany | D1 | |
| DE69209990T2 | Germany | T2 |
2 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN | |
| Publication of translation of european patent specificationUEP | UEP |
Numbers
- Application
- 92310954
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG VON EINER DIAMANTSCHICHT MITTELS CVD
- English
- METHOD FOR PRODUCING A DIAMOND SHIELD BY CVD
Classification
- CPC, 3
- C23C16/27
- C23C16/01
- Y10S427/103
- IPC, 8
- B01J19 00
- C23C16 01
- C23C16 26
- C23C16 27
- C30B25 02
- C30B25 18
- C30B29 04
- H01L21 205