Nova Patents
AT115292T

Noninvasive method and apparatus for characterization of semiconductors

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

23 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
DocumentOfficeKindDate
14592388United States of AmericaA
17167788United States of AmericaA
28079388United States of AmericaA

Members23

Family members, oldest first
DocumentOfficeKind
US4827212AUnited States of AmericaA
EP0325453A2European Patent Office (EPO)A2
EP0325453A3European Patent Office (EPO)A3
JPH01289130AJapanA
US4891584AUnited States of AmericaA
WO9006520A2World Intellectual Property Organization (WIPO)A2
WO9006520A3World Intellectual Property Organization (WIPO)A3
EP0397846A1European Patent Office (EPO)A1
JPH03502498AJapanA
WO9120156A1World Intellectual Property Organization (WIPO)A1
US5091691AUnited States of AmericaA
US5105451AUnited States of AmericaA
CA1301954CCanadaC
EP0489146A1European Patent Office (EPO)A1
JPH05501768AJapanA
EP0325453B1European Patent Office (EPO)B1
AT115292TThis recordAustriaT
DE68919716D1GermanyD1
DE68919716T2GermanyT2
JPH0787213B2JapanB2
EP0489146B1European Patent Office (EPO)B1
DE69119559D1GermanyD1
DE69119559T2GermanyT2